A tool for characterizing the mechanical properties of surfaces or structures, designed to function with sub-nanometer resolution in an in-situ vacuum environment.
The InSEM is a tool for characterizing the mechanical properties of surfaces or structures, which is designed to function with sub-nanometer resolution in an in-situ vaccum environment such as an SEM or FIB.
主要用于金属及非金属材料和薄膜的常温环境下电镜SEM中或FIB中静态动态原位纳米压痕力学性能测试和物性参量测量试验。
The InSEM is designed to be modular and flexible, to enable a wide range of application. Port availability on SEM/FIB chambers is often an issue. We've designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moced from one port to another or assembled into the on-stage configuration.
主要技术指标：
1加载单元
a) 压头总的位移范围 40um
b) 位移分辨率 0.2nm
c) 位移的噪音水平 0.1nm
d) 加载模式 电磁力加载
e) 位移测量 电容位移传感器
f) 常规载荷 25mN
g) 载荷分辨率 3nN
h) 载荷的噪音水平 200nN
i）最大载荷 200mN
j）载荷分辨率 0.5uN
k) 压载装置的刚度 80N/m
l) 阻尼系数 0.05N-s/m
m) 简谐力频率范围 120Hz
2高精度的反馈系统：
超高精度的超高线性的马达驱动的真空响应装置，将加载装置准确送到样品表面。
a)最大移动速度 156um/s
b)步进分辨率 3nm/encoder count
c)最大行程 2.54cm
3 NanoSuite 分析测试软件包
a) 压痕过程中点击鼠标可以实时切换显示测试参量（载荷、位移、硬度、弹性模量和接触刚度等）；
b) 可将所有测试数据输出到Excel格式；
c) 压头面积函数校对；
d) 计算和显示单个试样不同位置的测试参量的平均值和误差；
e) 计算和显示多个试样的测试参量的平均值和误差；
f) 给出测量结果的X-Y曲线，或柱状图，方便用户比较多个试样的测试结果。
4 用于电镜内XY轴20mm,Z轴15mm移动范围的线性移动平台，移动精度0.5nm。移动过程无后坐力、漂移极小。由纳米马达驱动，平台可以安装的环境包括大气环境、真空环境。
5 样品微夹持和移动装置，夹持部位长度1mm，精度50nm。
The InSEM utilizes the InForce 50, InQuest Controller and InView Software in a tool for in-situ SEM, FIB or vacuum characterization of the mechanical properties of surfaces or structures. The InSEM I and InSEM II mount to your SEM/FIB chamber wall to minimize the footprint within the chamber, and to make it easy to retract the system out of the way while other SEM/FIB testing modes are underway.
The InSEM III utilizes a stage-mounted cradle and micropositioners to position a sample relative to the InForce actuator. Designed to maximize frame stiffness while optimizing positioning resolution, the InSEM III provides versatile on-stage testing capabilities for applications in which the on-chamber configuration is limiting.
The Nanomechanics InSEM HT provides 800°C isothermal heating of the InForce tip and sample for the InSEM in-situ mechanical properties microprobe. Independent control of the tip and sample temperatures is integrated with multi-location thermocouple feedback, active cooling, and of course the precision and dynamic range of the mechanical test system itself.
