Cressington | |||||||
Carbon Coater 108carbon/A | |||||||
The Cressington 108 carbon coaters use a novel evaporation supply. Current and voltage are monitored by sensor wires in the head and the evaporation source is controlled as part of a feedback loop. The supply gives the conventional rod fed source unusual stability and reproducibility. Power consumption is low and the source shows exceptional re-starting characteristics. The evaporation source can be operated in "pulse" or "continuous" modes. | |||||||
|
|||||||
Carbon Coater 108carbon/A | |||||||
|
|||||||
|
|||||||
view specification | |||||||
|
|||||||
Pumping System
The modular desktop design combines carbon control unit, pumping system and thickness monitor into an area of only 42cm x 60cm (16" x 24"). The desktop pumping system is fully integrated using a quick release all metal coupling system. The compact high speed rotary pump (30sec to 0.1mb) is mounted on an anti-vibration table with a desktop base. The pumping system can be easily extended into a dual pumping system to accomodate the Cressington Sputter Coater along side a Cressington Carbon Coater. |
|||||||
|
|||||||
Thickness Monitors
Both 108 carbon coaters can be fitted with a high resolution thickness monitor. Resolution is better than 0.1nm for carbon. Careful use of monitor and evaporation controller gives better than 5% reproducibility of coating thickness in the useful 15nm - 25nm range. |
样品仓尺寸 | 120 mm x 120mm, 高强度不锈钢结构 |
样品台 | 可放置12个标准SEM样品座,高度可在 60mm内调节 |
溅镀材料 | Bradley 型高纯度碳棒, 无需削减或调整 |
溅镀优点 | 基于微处理器反馈控制,远程电流/电压感应;提供真空安全联锁装置,最大180A,配有过流保护 |
模拟计量 | 真空Atm - 0.001mb,电流: 0 - 200A |
控制方式 | 自动蒸镀控制,使用可编程电压控制和计时;可选择手动操作或自动控制数字计时 (0 – 30秒),数字电压设定 (0.1 to 6.0V) |
膜厚监控仪 | MTM-10高精度膜厚监控仪(选配) |
工作电压 | 220V, 50/60HZ |
适用配套 | FEI, Phenom, Zeiss, JEOL, Hitachi, Tescan等扫描电镜系统 |