NanoESCA with its world record imaging XPS resolution sets the benchmark for lateral resolution in laboratory XPS. Best imaging conditions are ensured by a high-flux monochromated X-ray multi-anode source.
Other light sources e.g. the fine focus HIS 13 UPS source offers optimum lab conditions for UPS in real space and k-space as well as Valence band spectroscopy.
However, the NanoESCA can also be used with Synchrotron radiation. Higher brightness and the tunable photon energy of today´s synchrotron sources allow operating the instrument under optimum conditions within the source´s energy band. High lateral resolution (< 100 nm achieved for imaging XPS) and additional experiments like laterally resolved XAS become possible.
Over the last decades standard XPS instruments (ESCA+) have matured towards routine sample analysis and instrument development is dominated mainly by software integration and ease-of-use.
Approaches towards new instrumentation beyond routine XPS sample analysis have been rare and imaging XPS with lateral resolution below 1µm stayed long out of reach.
The unique approach of a high resolution entrance lens and the revolutionary energy analyzer concept (IDEA = imaging double hemispherical energy analyzer) allowed NanoESCA to breach this barrier. In contrast to standard secondary electron microscopy (SEM) or x-ray beam induced secondary imaging (SXI) high lateral resolution PEEM imaging with excellent energy resolution allows detailed pre-analysis of the sample far beyond pure sample navigation.
As a result much deeper understanding of the local sample structure, chemistry and electronic structure becomes possible with NanoESCA - an instrument truly designed for imaging.
工作模式
Imaging X-ray Photoelectron Spectroscopy (Imaging ESCA mode)
The main lens has a large angular acceptance and projects the magnified image onto the analyser. The image information is energy filtered by highly aberration correcting IDEA and projected onto a MCP/screen stack for camera based date acquisition.
Small Spot Spectroscopy mode (optional)
High sensitivity single-spot spectroscopy using the channeltron® after the first energy analyser for quantitative elemental analysis.
Photoelectron Emission Microscope (PEEM) mode
Survey imaging with a large field of view, resolution down to 50 nm and real-time imaging of the surface. The lens projects a magnified image of the sample directly onto the PEEM screen.
