德国ScientaOmicron ESCA 2SR X光电子能谱仪

发布：2016-10-28 10:22　|　来源：未知　|　浏览：

产品概览

High throughput elemental analysis with ultimate sensitivity
Rapid snap shot automated measurements
State of the art 128 channel detector
Flexible configurations for GCIB, UPS, ISS, etc.
Interface to other modules, MBE, SPM, etc

Turnkey ESCA solution

ESCA 2SR is a versatile XPS instrument allowing for surface characterization by routine and advanced XPS and ESCA applications.

It is a convenient to use turnkey system which combines high sensitivity, excellent energy resolution and high sample throughput with an advanced sample stage concept optimized for routine and advanced scientific experiments. The stage handles multiple thin and thick samples and can be easily customized for individual needs of a specific experiment including options for heating and cooling.

The ESCA 2SR system includes a state of the art 128 channels detector, a dedicated 500 mm Rowland circle high power monochromatic x-ray source and efficient charge neutralization. A monoatomic ion sputter source is included in the base configuration.

The configuration of the ESCA 2SR can be easily expanded for a cluster ion source, a dual beam x-ray source, a UV source and various preparation facilities.

Vacuum System

The ESCA 2SR System includes a convenient to use, turnkey UHV system consisting of a mu-metal analysis chamber and an easy access fast entry load lock (FEL). A fast pump down sequence provides for short sample transfer times. Optional in-situ sample storage for multiple samples can be provided.

The system has interfaces for connecting a preparation chamber or a vacuum transport. Other options include connection to a glove box or custom UHV facilities to allow for multi-technique extensions (e.g. SPM or MBE). Furthermore, the analysis chamber includes additional ports for upgrade options such as a UV excitation source for UPS, a cluster ion source for depth profiling of sensitive materials etc.

The ESCA 2SR System is equipped with Mistral – a built- in PLC system control center with 12" touch screen and PC access.

Manipulator and stage controller
The ESCA 2SR operates using a large sample platen carrier. The carrier allows for mounting multiple samples and offers great flexibility for size and shape of sample specimen. Additionally the instrument can be operated using a dedicated sample platen for rotation during depth profiling. A large verity of other stage options allows for tailoring to the stage to the individual needs.

System Features/系统特征指标

System Details
- Mu metal analysis chamber
- Turnkey computer controlled UHV System
- Fast entry load lock with multi sample entry
- Camera assisted sample navigation
- Optional preparation chamber and sample treatment facilities

Sample Stage
- Automated multi stage concept
- Large sample platen
- Optional rotation sample holder
- Optional sample heating and cooling
- Other sample stage features on request

Hemispherical Analyser
- Multi element lens system with compression lens
- Large and small area XPS
- Scanned and snapshot acquisition
- Imaging XPS and chemical state mapping
- Angle Resolved XPS

Detector
- 128 channel detector with ultimate sensitivity
- Fast snapshot mode for spectroscopy and imaging
- Scanned acquisition

Charge neutralization
- Computer controlled neutralization

Excitation sources
- High power monochromated x-ray source with 500 mm Rowland circle
- Ion source for depth profiling and neutralization and ISS
- Optional Gas Cluster Ion Beam Source
- Optional dual anode x-ray source Mg/Al
- Optional High intensity VUV source
- Various electron sources on request